Description
Electron Probe Microanalyzer
By utilizing an advanced electron-optical system with a thermofield emission source (Schottky emitter), the EPMA-8050G microanalyzer delivers unprecedented spatial resolution of SEM images across a wide current range (up to 1 µA). Combined with high-performance X-ray spectrometers, an optical microscope, a dual digital scan converter, and a new workstation, the system achieves outstanding precision in microanalysis.
Features
- The use of a high-performance Schottky emitter in the electron gun design significantly narrows the beam diameter and provides ultra-high spatial resolution across the entire accelerating voltage range.
- Image resolution in secondary electrons — 3 nm at 30 kV — is the highest among all EPMA systems.
- A stable electron beam with a maximum probe current of 3 µA enables high spatial resolution and sensitivity without the need to adjust the objective aperture.
- The dual-stage vacuum system maintains a constant high vacuum in the electron gun chamber, ensuring beam stability required for precision microanalysis.
