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Device for measuring the contours and roughness of parts, CMI-Z60R

Metrology Technology Research & Development (Taiwan)

Description

Contour measurement principle:
  • The instrument measures rectangular coordinates using X and Z-axis sensors, displays the contour coordinate points of the workpiece surface, and transmits them to a PC via electronic components.
  • The software then processes the received coordinates mathematically according to technical requirements.
Roughness measurement principle:
  • Uses a differential inductive roughness sensor — an advanced, highly sensitive technology combining an induction coil with modern design.
  • The sensor provides extremely high linearity accuracy over a wide measuring range.
  • The device features a guide-less design, using a precision guide as a reference.
  • Contour measurement error is less than 0.005 μm.
  • Capable of measuring roughness on flat, inclined, and arc surfaces with high accuracy.
Contour measurement functions:
  • Horizontal and vertical dimensions, linear distance, radius, diameter.
  • Angle measurement: horizontal and vertical angles.
  • Position tolerances: parallelism and perpendicularity.
  • Shape tolerances: straightness, crown profile, arc profile, circle.
  • Auxiliary constructions: point, line, circle.
Roughness measurement functions:
  • Roughness parameters: Ra, Rp, Rv, Rz, Rz(jis), R3z, RzDIN, Rzj, Rmax, Rc, Rt, Rq, Rsk, Rku, Rsm, Rs, Rq, Rk, Rpk, Rvk, Mr1, Mr2, Rmr.
  • Waviness parameters: Wa, Wt, Wp, Wv, Wz, Wq, Wsm, Wsk, Wku, Wmr.
  • Original contour parameters: Pa, Pt, Pp, Pv, Pz, Pq, Psm, Psk, Pku, Pmr.
Technical features:
  • The worktable and Z-axis column are made of natural granite — stable structure with no deformation.
  • High-precision contact sensors on the X and Z axes enable automated and accurate measurements.
  • Key components are made of special alloys and thermally treated to relieve internal stress, ensuring durability and precision.
Notes:
  1. H — measurement height in horizontal position.
  2. For standard 2 mm<R<10 mm balls, sampling arc angle is 120°.
  3. Corner blocks 60° and 90°, sampling length 5 mm.
  4. The measurement range specifications can be customized and updated as required.

Technical Specifications

Measuring range (X axis) 150 mm
Resolution (X axis) 0.2 µm
Measuring range (Z1 axis) 60 mm
Resolution (Z1 axis) 0.05 µm
Measuring range (Z axis) 420 mm
Measurement accuracy (Z1 axis) ±(0.8 + |0.15H|) µm
Measurement accuracy (arc) ±(1.5 + R/12) µm
Measurement accuracy (angular) ±1′
Measurement accuracy (linear) 0.5 µm/100 mm
Roughness accuracy ≤±(5 µm ±3%)
Residual interference (without guide) ≤0.005 µm
Repeatability 1δ ≤ 1 µm
Cut-off wavelength 0.025, 0.08, 0.25, 0.8, 2.5, 8
Evaluation length λc X1, 2, 3, 4, 5, 6, 7
Measuring range (Z1 axis, roughness) ±620 µm
Resolution (Z1 axis, roughness) 262144:1
Drive type (X axis) Electric
Drive type (Z axis) Electric
Feed speed (X axis) 0.05–15 mm/s
Feed speed (Z axis) 0.2–15 mm/s

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